Handbook of Silicon Based MEMS Materials and Technologies (Paperback)
 
作者: Markku Tilli 
分類: Materials science  
書城編號: 1639135


售價: $3000.00

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出版社: Elsevier Science & Technology
出版日期: 2020/04/17
尺寸: 235x191x88mm
重量: 2.32 kg
ISBN: 9780128177860
 
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商品簡介


Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures.

The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students.

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