Temperature Measurement During Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers (2016) (paperback)
 
作者: Denise Reichel 
書城編號: 988597


售價: $550.00

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出版社: Springer
出版日期: 2016/01/14
重量: 0.19 kg
ISBN: 9783658113872
 
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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

Denise Reichel 作者作品表

Temperature Measurement During Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers (2016) (paperback)

eBook: Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers (DRM PDF)

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